JPS63128734U - - Google Patents
Info
- Publication number
- JPS63128734U JPS63128734U JP2096287U JP2096287U JPS63128734U JP S63128734 U JPS63128734 U JP S63128734U JP 2096287 U JP2096287 U JP 2096287U JP 2096287 U JP2096287 U JP 2096287U JP S63128734 U JPS63128734 U JP S63128734U
- Authority
- JP
- Japan
- Prior art keywords
- holding plate
- wafer
- thickness
- support stand
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2096287U JPS63128734U (en]) | 1987-02-16 | 1987-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2096287U JPS63128734U (en]) | 1987-02-16 | 1987-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128734U true JPS63128734U (en]) | 1988-08-23 |
Family
ID=30816962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2096287U Pending JPS63128734U (en]) | 1987-02-16 | 1987-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128734U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123726A (ja) * | 1988-11-02 | 1990-05-11 | Mitsubishi Electric Corp | ウエハ貼付装置 |
| JP2022076381A (ja) * | 2020-11-09 | 2022-05-19 | 日本放送協会 | 接合用治具、および接合方法 |
-
1987
- 1987-02-16 JP JP2096287U patent/JPS63128734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123726A (ja) * | 1988-11-02 | 1990-05-11 | Mitsubishi Electric Corp | ウエハ貼付装置 |
| JP2022076381A (ja) * | 2020-11-09 | 2022-05-19 | 日本放送協会 | 接合用治具、および接合方法 |